型號 Model

JK-100

JK-150

JK-200

JK-300

JK-400

JK-630

JK-800

極限壓力(Pa) Ultimate Pressure

10-4

抽氣速率(1/S) Pumping speed

100

280

420

900

1800

4000

6500

大排氣壓力(Pa) Max. pumping pressure

35

加熱功率(Kw) Heating power

0.8

1

1.5

2.1

4.8

8.4

19.8

配用主泵 Matched main pump

K-100

K-150

K-200

K-300

K-400

K-630

K-800

配用擋板 Matched baffle

LB-100

LB-150A

LB-200B

LB-300A

LB-400

LB-630

LB-800

配用閥門 Matched valve

GD-100

GD-150

GD-200

GDQ-300

GDQ-400

GDQ-630

GDQ-800

配用前級泵 Matched backing pump

2X-4

2X-8

2X-8

2X-15

2X-30

2X-70

2X-70 ZJ-600

接口法蘭 Connecting flange

LF-100

LF-150

LF-200

LF-300

LF-400

LF-630

LF-800

結構尺寸(mm) Structure dimensions

H

870

950

1000

1300

1600

2000

2400

L

550

650

750

850

950

1100

2000

型號 Model

JTK-100

JTK-150

JTK-200

JTK-300

JTK-400

JTK-500

極限壓力(Pa) Ultimate Pressure

10-4

抽氣速率(1/S) Pumping speed

180

370

600

1400

2500

4000

大排氣壓力(Pa) Max. pumping pressure

35

加熱功率(Kw) Heating power

0.8

1.2

1.5

2.4

4.5

6

配用主泵 Matched main pump

TK-100

TK-150

TK-200

TK-300

TK-400

TK-500

配用擋板 Matched baffle

LB-100

LB-150A

LB-200B

LB-300A

LB-400

LB-500

配用閥門 Matched valve

GD-100

GD-150

GD-200

GDQ-300

GDQ-400

GDQ-500

配用前級泵 Matched backing pump

2X-4

2X-8

2X-15

2X-30

2X-70

2X-70 ZJ-600

接口法蘭Connecting flange

LF-100

LF-150

LF-200

LF-300

LF-400

LF-500

結構尺寸(mm) Structure dimensions

1、前級泵Backing pump

2、電磁放氣閥Solenoid vent valve

3、低真空閥Low vacuum valve

4、測量接頭 Measurement connector

5、閥門 Valve

6、放氣閥Venting valve

7、高真空閥High vacuum valve

8、測量接頭Measurement connector

9、測量接頭Measurement connector

10、水冷擋板Water-cooling baffle

11、擴散泵Diffusion pump

12、支架Support

1、支架 Support

2、擴散泵 Diffusion pump

3、前級泵 Backing pump

4、電磁放氣閥 Solenoid vent valve

5、波紋管 Bellows

6、組合閥 Combined valve

7、高真空閥 High vacuum valve

8、高真空規 High vacuum gauge

9、水冷檔板 Water-cooling baffle

10、低真空規 Low vacuum gauge

11、充(放)氣閥 Venting valve